The invention is directed to an arrangement for generating pulsed currents
for gas discharge pumped radiation sources, particularly with high
repetition rates and high current strengths for generating plasma
emitting EUV radiation. The object of the invention, to find a novel
possibility for generating pulsed high-energy currents for a gas
discharge pumped radiation source which permits a stable generation of
high voltage and a reliable resetting of voltage using simple circuitry,
is met according to the invention in that the charging circuit is an LC
inversion charging circuit which communicates with a DC voltage source
that provides only one half of the high voltage required for the gas
discharge, wherein the inversion charging circuit has a capacitor bank
with a first capacitor arranged directly parallel to the DC voltage
source and a second capacitor which contributes after simultaneous
charging to the recharging of the first capacitor by a triggered switch
by a saturable recharging inductor for recharging the first capacitor, as
a result of which the full high voltage required for discharging is
provided in the capacitor bank.