A double substrate spatial light modulator with an enlarged tilt angle is achieved.
The device comprises a mirror attached on one end to a hinge wherein the hinge
is attached to support posts adjacent to the mirror and attached to an underlying
glass substrate, a trench within the glass substrate adjacent to the support posts
wherein the mirror tilts upward from the glass substrate and downward into the
trench, and an overlying glass substrate. The trench provides an enlarged tilt
angle of mirror motion. This improves optical performance of the mirror projector
including contrast ratio and gray scale.