A planar lightwave circuit includes at least one optical waveguide core, and
at
least one feature proximate the core having a stress-engineered property to balance
stress and therefore minimize birefringence affecting the core. A protective passivation
layer is formed over the core and the feature to be substantially non-interfering
with the balanced stress provided by the feature. The stress balancing feature
may be an overcladding layer formed over the core, doped to have a coefficient
of thermal expansion approximately matched to that of an underlying substrate,
to symmetrically distribute stress in an undercladding between the overcladding
and the substrate, away from the core. The protective passivation layer is formed
to have a coefficient of thermal expansion approximately matched to that of the
overcladding. In one exemplary embodiment, the passivation layer is formed from
silicon nitride. Related concepts of stress release grooves, and core overetching,
are also disclosed.