In a laser processing apparatus including an ultra-short pulse laser a focusing
optical system and processing a work by projecting a beam delivered through the
focusing optical system on to the work, the focusing optical system has at least
a pair of diffractive surface and a refractive surface, and chromatic aberration
is corrected or chromatic aberration and pulse extension are corrected by making
use of the diffractive dispersions due to and the diffractive surface the refractive
dispersion due to of the refractive surface. With this arrangement, chromatic aberration
is corrected or both chromatic aberration and pulse expansion are corrected in
the processing with the ultra-short pulse laser and thereby improve the practical
use and value of the processing by improving its accuray, qualiy and speed.