The present invention provides a system and method for selectively removing one
or more organic and inorganic and also preferably one or more inorganic contaminants
from plating baths. More particularly, the invented method relates to the use of
a source of energy in combination with chemical oxidants, alone or in conjunction
with a catalyst to oxidize organic contaminants in the plating bath to a level
such that the electroplating bath can be recovered and reused after appropriate
chemical adjustment. The oxidative treatment method may be a continuous process
or a batch process that is performed in a single pass. Residual organics, if desired
and chloride ions in the bath are removed from the solution by a chemisorption
or physisorption treatment. Inorganic contaminants are removed from the electroplating
bath by selective ion exchange resins or electrodialysis, while particulate and
suspended colloidal particles are removed by filtration before the treated plating
bath is recycled.