To provide a film forming apparatus in which an impurity contained in an organic
compound is separated to be removed and a film is formed without decreasing the
purity of the purified organic compound, whereby a high-purity organic compound
is formed. A film forming apparatus of the present invention includes a purifying
chamber for purifying an organic compound and a film forming chamber for vapor-depositing
the purified organic compound onto a substrate. The organic compound purified by
a zone melting method in the purifying chamber can be vapor-deposited onto the
substrate provided in the film forming chamber without decreasing the purity thereof,
so that a high-purity organic compound layer can be formed.