A reflection type liquid crystal display device having excellent display capability
even if the number of the photolithography process is reduced and a process for
producing the device. A process includes the steps of (a) forming a source/drain
wiring by using a first mask; (b) forming a thin film transistor region and gate
wiring by using a second mask; (c) forming an opening for a transistor, in a passivation
film by using a third mask; (d) forming a rough surface of the interlayer insulating
film and to form an opening for the transistor by using a fourth mask by halftone
exposure, and (e) forming a reflective metal which extend through the respective
openings for the transistor in the passivation film and the interlayer insulating
film so that it is electrically connected to the source wiring by using a fifth mask.