An X-ray exposure apparatus extracts exposure X-rays from light called synchrotron
radiation from a synchrotron radiation source by an optical path including an X-ray
mirror and performs exposure using the extracted X-rays. The X-ray mirror contains
a material having an absorption edge in at least one of a wavelength range of less
than 0.45 nm and a wavelength range exceeding 0.7 nm, thereby implementing exposure
using the X-ray in the range of 0.45 nm to 0.7 nm. The X-ray mirror contains at
least one material selected from the group consisting of iron, cobalt, nickel,
copper, manganese, chromium, and their alloys, nitrides, carbides, and borides.