A distributed Bragg reflector and a method of fabricating the same incorporates
a support for supporting the gaps against collapse. The method includes forming
a plurality of alternating structure and sacrificial layers on a substrate. The
structure and sacrificial layers are etched into at least one mesa protruding from
the substrate. A support layer is formed on the at least one mesa leaving a portion
of the structure and sacrificial layers exposed. At least a portion of at least
one of the exposed sacrificial layers are etched from between the structure layers
to form gaps between the structure layers.