Methods of forming optoelectronic devices include forming an electrically
conductive layer on a first surface of a substrate and forming a mirror backing
layer from the electrically conductive layer by forming an endless groove that
extends through the electrically conductive layer. A step is then performed to
remove a portion of the substrate at a second surface thereof, which extends opposite
the first surface. This step exposes a front surface of the mirror backing layer.
An optically reflective mirror surface is then formed on the front surface of the
mirror backing layer.