An array of bottom-emitting VCSELs, with its substrate still intact, is tested
by means of a probe that includes an optoelectronic array, which is aligned and
coupled to the top surface of the VCSEL array. The probe is aligned to the VCSEL
array just once. The optoelectronic array includes driver circuits for energizing
the VCSELs and the photodetection circuits in a predetermined sequence for detecting
the back emission that leaks through the top mirror of each VCSEL. In another embodiment,
this probe and method are applied to testing bottom-emitting VCSELs one at a time.
The VCSELs may discrete devices or part of an array. In accordance with another
aspect of our invention, an array of bottom-emitting VCSELs, with its substrate
still in intact, is tested by means of a probe that includes separate electronic
and photodetection arrays. The probe is aligned to the VCSEL array just once. The
electronic array, which is electrically coupled to the top surface of the VCSEL
array, includes driver circuits for energizing the VCSELs. The photodetection array
is aligned and coupled to the bottom of the substrate in order to detect the primary
bottom emission of the energized VCSELs. The photodetection array is aligned so
that each detector receives the emission from a particular VCSEL, but because the
substrate is relatively thick, the divergence of the bottom emission produces cross-talk;
that is, the bottom emission of one VCSEL may be received by an adjacent photodetector
that is supposed to detect only the emission from another VCSEL. To alleviate this
cross-talk problem, the VCSELs are energized in a first predetermined sequence
and/or the photodetector circuitry is turned on in a second predetermined sequence.