A ferroelectric memory device, e.g., nonvolatile, has an effective layout by
eliminating
a separate cell plate line. The ferroelectric memory device includes first and
second split word lines formed over first and second active regions of a semiconductor
substrate, and the first and second active regions are isolated from each other.
Source and drain regions are formed in the first active region on both sides of
the first split word line and the second active region on both sides of the second
split word line. A conductive barrier layer, a first capacitor electrode and a
ferroelectric layer are sequentially formed on the first and second split word
lines. Two second capacitor electrodes with one connected to one of the source
and drain regions of the second active region is formed over the first split word
line. The other one is connected to one of the source and drain regions of the
first active region and is formed over the second split word line. First and second
bit lines are respectively connected to the other one of the source and drain regions
of the first active region, and the other one of the source and drain regions of
the second active region.