The present invention provides a method of preventing or reducing X-ray-induced
temporal changes of a semiconductor photoelectric conversion film formed on a TFT
substrate, in which a protective film or sheet is used to protect the semiconductor
photoelectric conversion film in order to improve weather resistance such as light
blocking effect and moisture resistance.
The present invention provides a radiation detecting element characterized by
including a substrate having a plurality of pixel areas formed thereon, each having
at least one switching element and at least one charge storage capacity, a photoelectric
conversion film formed on the individual pixel areas for converting radiation into
electrical charge, a protective film individually covering the photoelectric conversion
film and having an area that is substantially the same as or larger than that of
at least the photoelectric conversion film and a seal member and a sealant arranged
so as to enclose the photoelectric conversion film, for fixing the protective film.