A process for fabricating high-voltage drain-extension transistors, whereby the
transistors are integrated in a semiconductor substrate along with non-volatile
memory cells that include floating gate transistors. The process includes: defining
respective active areas for HV transistors and floating gate transistors in a semiconductor
substrate, with the active areas separated from each other by insulating regions;
forming insulated gate regions of the HV transistors; performing a first dopant
implantation to form first portions of the HV transistor junctions; conformably
depositing a dielectric layer onto the whole substrate to provide an interpoly
layer of the floating gate transistor; making openings at the first portions of
the HV transistor junctions; performing, through the openings, a second dopant
implantation to form second portions of the high-voltage transistor junctions,
with perimeter areas of the gate regions and the active area of the floating gate
transistor being screened off by the dielectric layer.