A system for determining at least one condition of a substrate includes an optical
waveguide for transmitting light from a light source. The optical waveguide can
be embedded in the substrate and operatively coupled to an interferometric system.
The interferometric system is operatively coupled to a processor. The interferometric
system provides the processor with information relating to transmissions through
the wave guide, which are indicative of substrate conditions and/or operations
being performed relative to the substrate.