The present invention provides a sulfonate of the formula (I):
##STR1##
wherein Q1, Q2, Q3, Q4 and Q5
each independently represent hydrogen, alkyl having 1 to 16 carbon atoms,
alkoxy having 1 to 16 carbon atoms, halogen, aryl having 6 to 12 carbon atoms,
aralkyl having 7 to 12 carbon atoms, cyano, sulfide, hydroxy, nitro or a group
of the formula (I)
wherein X represents alkylene and at least one —CH2—
in the alkylene may be substituted by —O— or —S—, and Cy1
represents alicyclic hydrocarbon having 3 to 20 carbon atoms,
and A+ represents a counter ion, with the proviso that at least one
of Q1, Q2, Q3, Q4 and Q5 is
the group of the formula (I).
The present invention also provides a chemical amplification type positive resist
composition comprising a sulfonate of the formula (I) and resin which contains
a structural unit having an acid labile group and which itself is insoluble or
poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous
solution by the action of an acid.