Applying and utilizing a hybrid material in a surface coating to provide or enhance properties, attributes and/or characteristics to the surface, such as at least a portion of an electrosurgical electrode tip. The hybrid material includes a combination of at least one of an organic polymer, an inorganic polymer, or an organic material with at least one of a ceramic or a silicon. The presence of the hybrid material coating layer provides a high temperature stability that withstands the temperatures of electrosurgery and a flexibility to increase the durability of the surface. Other materials may be included in the surface coating, such as a fluoropolymer, a water-soluble polymer, catalytic particles that may be activated or other materials that enhance the properties, characteristics and/or attributes of the coated surface. Optionally, an additional covering layer may be applied over the hybrid material coating layer to enhance the characteristics of the coated surface.