A low-voltage electromechanical device including a tiltable microplatform, method
of tilting same and array of such devices are provided. The tiltable or steerable
microplatform utilizes a bent-beam actuator to achieve large tilting angles with
low actuation voltages. Thin beams of the actuator are bent in such a way as to
cause the microplatform to pivot around a dimple support that generates a torsional
force leading to angular motion in suspension beams attached perpendicular to the
thin beams and, in turn, leading to angular or tilting motion in the suspended
microplatform. Some of the key features include (1) the low-voltage bent-beam actuator;
(2) a dimple-supported microplatform with a hole underneath in the substrate to
allow light to pass through and to allow unhindered tilting of the microplatform;
and (3) a method for constructing a microprism on the tiltable transparent microplatform
for color dispersion purposes in an adaptive vision system.