A light modulating device comprising a plurality of light modulating elements
modulating
the light that is incident thereto and emitting the light, wherein each of the
light modulating elements is formed from a micro electronic machinery which is
two-dimensionally arranged, and the transmittance can be controlled so as to vary
for each of the light modulating elements. The light modulating device further
comprises a lens array on a light-incident side of the light modulating elements,
and the lens array condenses the incident light, which impinges on each of the
light modulating elements, into a region whose area is smaller than an area occupied
by each of the light modulating elements at a light-incident side thereof. Consequently,
the light modulating device, in which usability of the light is improved and resolution
is increased in the projection exposure, and the exposure apparatus using the same
can be obtained.