A deflector which deflects a charged particle beam includes a substrate having
an opening through which the charged particle beam should pass, and a deflection
electrode which is arranged in the opening to deflect the charged particle beam
and has a first conductive member and second conductive member, which are formed
by plating. The second conductive member is formed on the surface of the first
conductive member and is made of a material that is more difficult to oxidize than
the first conductive member. The first conductive member is made of a material
having smaller residual stress than the second conductive member.