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A package for mounting an integrated circuit die. In one embodiment the package
comprises a metal substrate having first and second opposing primary surfaces and
an aperture formed therebetween. A flexible thin film interconnect structure is
formed over the first surface of the metal substrate and over the aperture. The
flexible thin film interconnect structure has bottom and top opposing surfaces,
a first region that is in direct contact with the first surface of the metal substrate
and a second region that is opposite the aperture. The bottom surface of the thin
film interconnect structure is in direct contact with the metal substrate in the
first region. The thin film interconnect structure comprises (i) a first dielectric
layer formed directly on the first surface of the metal substrate and extending
over the aperture; (ii) a first metalization layer, formed over the first dielectric
layer, comprising a plurality of signal lines positioned over the first region
of the thin film interconnect structure and a first plurality of bonding pads positioned
over the second region of the thin film interconnect structure; and (iii) a second
plurality of bonding pads on the top surface of the thin film interconnect structure.
The first plurality of bonding pads have a first pitch appropriate for attaching
the integrated circuit die to the package and the second plurality of bonding pads
have a pitch greater than the first pitch. Other embodiments of chip level packages
as well as various methods for forming such packages are also disclosed.
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< Low-loss coplanar waveguides and method of fabrication
< Unmolded package for a semiconductor device
> Thin-film magnetic head, a head gimbal assembly, and a hard disk drive
> Thin-film magnetic head, method of manufacturing the same, head gimbal assembly, and hard disk drive
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~ 00214
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