A positioning apparatus for performing position of a target object in a vacuum atmosphere. The apparatus includes a first structure, a second structure which is movable relative to the first structure and supports the target object, a radiation plate, which is arranged on the first structure, performing heat exchange between the radiation plate and the second temperature by utilizing radiation, and a temperature adjusting device for adjusting of a temperature of the radiation plate. The temperature adjusting device adjusts the temperature of the radiation plate to control a temperature of the second structure or the target object.