A chemical amplifying type positive resist composition having excellent sensitivity
and resolution, manifesting no generation of scum is provided, which comprises
a resin which has a polymerization unit derived from hydroxystyrene and a polymerization
unit derived from 2-ethyl-2-adamantyl (meth)acrylate, and is insoluble or poorly
soluble itself in an alkali, but becomes alkali-soluble after dissociation of the
above-mentioned acid unstable group by the action of an acid; a radiation sensitive
acid generating agent; and polypropylene glycol.