A microcolumn including a plurality of beam modification components coupled to
an assembly substrate, wherein the plurality of beam modification components includes:
(1) an extractor component; (2) a first focusing electrode component; (3) a first
anode component; (4) a first deflector component; (5) a second focusing electrode
component; (6) a second deflector component; (7) a third focusing electrode component;
(8) a third deflector component; (9) a second anode component; (10) a fourth focusing
electrode component; and (11) a third anode component. The beam modification components
may be ordered on the substrate in this sequence or other sequences.