A system and method is disclosed for allocating multi-function resources among
a plurality of tasks within a process system in semiconductor wafer fabrication.
A resource allocator allocates multi-function resources among tasks within a process
system that executes at least one application process. The resource allocator comprises
a monitoring controller, model of the process system, a resource allocation controller,
and a compliance-monitoring viewer. The compliance-monitoring viewer is operable
to display process system information to illustrate plan compliance, information
visualized over a time period of years, months, days, hours, seconds, microseconds
or the like.