A method for decomposing a perfluorocarbon in the presence of water vapor
or water vapor and molecular oxygen in gas phase, in which a catalyst of a
phosphate comprising at least one element selected from the group
consisting of aluminum, boron, alkali earth metal, titanium, zirconium,
lanthanum, cerium, yttrium, rare earth metal, vanadium, niobium, chromium,
manganese, iron, cobalt and nickel, and phosphorus oxide, is used.