A multilayered torsional hinged device such as a scanning mirror including a
hinge
layer with an attaching member pivotally supported by torsional hinges. A front
layer is bonded to the front side of the attaching member and a back layer is bonded
to the back side of the attaching member. The front layer and the back layer have
equal mass moments to balance the moment of inertia and stresses on the torsional
hinges. Further, the attaching member and a back portion of the front layer define
a spine structure that extends to the tips of the mirror. The spine structure allows
reduction of weight and mass of the mirror while maintaining mirror stiffness.
The back layer may be a permanent magnet if the mirror oscillating drive is a magnetic
drive. Alternately, the back layer may be another silicon slice.