Manufacturing lines include inspection systems for monitoring the quality
of parts produced. Manufacturing lines for making semiconductor devices generally
inspect each fabricated part. The information obtained is used to fix manufacturing
problems in the semiconductor fab plant. A machine-vision system for inspecting
devices includes a light source for propagating light to the device and an image
detector that receives light from the device. Also included is a light sensor assembly
for receiving a portion of the light from the light source. The light sensor assembly
produces an output signal responsive to the intensity of the light received at
the light sensor assembly. A controller controls the amount of light received by
the image detector to a desired intensity range in response to the output from
the light sensor. The image detector may include an array of imaging pixels. The
imaging system may also include a memory device which stores correction values
for at least one of the pixels in the array of imaging pixels. To minimize or control
thermal drift of signals output from an array of imaging pixels, the machine-vision
system may also include a cooling element attached to the imaging device. The light
source for propagating light to the device may be strobed. The image detector that
receives light from the device remains in a fixed position with respect to the
strobed light source. A translation element moves the strobed light source and
image detector with respect to the device. The strobed light may be alternated
between a first and second level.