A system and method is disclosed for allocating multi-function resources among a plurality of tasks within a process system in semiconductor wafer fabrication. A resource allocator allocates multi-function resources among tasks within a process system that executes at least one application process. The resource allocator comprises a monitoring controller, model of the process system, a resource allocation controller, and a graphical user interface. The graphical user interface transforms process system information of the resource allocator into an audio-visual format to enable supervisory interaction. In one embodiment the graphical user interface provides information to reduce load conflict among multiple furnaces in semiconductor wafer fabrication.

 
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