A system and method is disclosed for allocating multi-function resources among
a plurality of tasks within a process system in semiconductor wafer fabrication.
A resource allocator allocates multi-function resources among tasks within a process
system that executes at least one application process. The resource allocator comprises
a monitoring controller, model of the process system, a resource allocation controller,
and a graphical user interface. The graphical user interface transforms process
system information of the resource allocator into an audio-visual format to enable
supervisory interaction. In one embodiment the graphical user interface provides
information to reduce load conflict among multiple furnaces in semiconductor wafer fabrication.