A new route has been found leading to the formation of pentafluorosulfuranyl arylenes. In its broadest aspect the process comprises:

    • effecting dehydrohalogenation or dehydrogenation of a pentafluorosulfuranyl cycloaliphatic compound represented by either of the structures: ##STR1##
    • wherein R1-5 are H, halogen, C1-10 alkyl, C1-10 alkoxy, C1-10 thionyl, C1-10 alkyl ether, aryl and substituted aryl, thioether, sulfonyl, carboalkoxy, alkylamino, arylamino, alkylphosphoryl, alkylphosphonyl, arylphosphonyl, arylphosphoryl, and mixtures thereof and X is a halogen atom
    • to form the pentafluorosufuranyl arylene represented by the structures: ##STR2##
    • wherein R1-R5 are as represented above.
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