A multi-layered unit according to the present invention includes a support substrate
formed of fused quartz, an electrode layer formed on the support substrate and
formed of a conductive material, a buffer layer formed on the electrode layer and
formed of a dielectric material containing a bismuth layer structured compound
having a composition represented by Bi4Ti3O12
and having an excellent orientation characteristic so that the bismuth layer structured
compound is oriented in the c axis direction, and a dielectric layer formed on
the buffer layer and formed of a dielectric material containing a bismuth layer
structured compound having a composition represented by SrBi4Ti4O15
and having an excellent orientation characteristic so that the bismuth layer
structured compound is oriented in the c axis direction. Since the thus constituted
multi-layered unit includes the dielectric layer containing the bismuth layer structured
compound oriented in the c axis direction, in the case of, for example, providing
an upper electrode on the dielectric layer to form a thin film capacitor and applying
a voltage between the electrode layer and the upper electrode, the direction of
the electric field substantially coincides with the c axis of the bismuth layer
structured compound contained in the dielectric layer. As a result, since the ferroelectric
property of the bismuth layer structured compound contained in the dielectric layer
can be suppressed and the paraelectric property thereof can be fully exhibited,
it is possible to fabricate a thin film capacitor having a small size, large capacitance
and an excellent dielectric characteristic.