The present invention provides a method for slicing a single crystal, wherein
the single crystal is sliced by irradiating a portion to be sliced with an ultra
short pulse laser beam while supplying a gas containing gaseous molecules or radicals
that react with atoms constituting the single crystal to become stable gaseous
molecules in the vicinity of the portion under slicing. Thus, there is provided
a method for slicing a single crystal by using a laser processing, in which a single
crystal is processed while obtaining a good sliced surface and markedly reducing
a slicing loss.