A method employing a photolithography mask for producing microtextured antireflective
surfaces is disclosed. The photolithography mask is used during the exposure of
photoresist to a pattern of ultraviolet light. The exposed photoresist is subsequently
processed to obtain a microtextured surface possessing antireflective properties.
The antireflective surface profile comprises an array of sub-micron protuberances
that may reside in a periodic arrangement, a quasiperiodic arrangement, or in an
arbitrary non-periodic arrangement. The antireflective surface is designed for
visible light. It may be scaled-up to large areas, and is suitable for replication
into inexpensive polymer materials.