To fabricate an integrated semiconductor product with integrated metal-insulator-metal
capacitor, first of all a dielectric protective layer (5) and a dielectric
auxiliary layer (16) are deposited on a first electrode (2). The
protective layer and the auxiliary layer (16) are then opened up (17)
via the first electrode. Then, a dielectric layer (6) is produced, and the
metal track stack (7, 8, 9) for the second electrode is then applied to
the dielectric layer (6). This is followed by the patterning of the metal-insulator-metal
capacitor using known etching processes. This makes it possible to produce dielectric
capacitor layers of any desired thickness using materials which can be selected
as desired. In particular, this has the advantage that via etches can be carried
out significantly more easily than in the prior art, since it is not necessary
to etch through the residual dielectric capacitor layer above the metal tracks.