The electron emission characteristics and adjustment times of a multi electron
source are made approximately equal with simple processes. A characteristics adjustment
method for a multi electron source having a plurality of electron emitting devices
disposed on a substrate, comprising the steps of measuring electron emission characteristics
of each of the electron emitting devices and setting a characteristics adjustment
target value, applying a plurality of characteristics shift voltages having discrete
values to some of the electron emitting devices, measuring electron emission characteristics
of each of the electron emitting devices, and creating a characteristics adjustment
table for each of the characteristics shift voltage values in accordance with change
rates of the measured electron emission characteristics, selecting a predetermined
characteristics shift voltage value from the plurality of characteristics shift
voltage values by referring to the characteristics adjustment table created for
each of the electron emitting device and applying the predetermined characteristics
shift voltage to the electron emitting device to shift the characteristics toward
the characteristics adjustment target value, and monitoring a change in the electron
emission characteristics to revise a characteristics shift condition.