A technique for forming at least part of an array of a dual bit memory core is
disclosed. Initially, a portion of a charge trapping dielectric layer is formed
over a substrate and a resist is formed over the portion of the charge trapping
dielectric layer. The resist is patterned and a pocket implant is performed at
an angle to establish pocket implants within the substrate. A bitline implant is
then performed to establish buried bitlines within the substrate. The patterned
resist is then removed and the remainder of the charge trapping dielectric layer
is formed. A wordline material is formed over the remainder of the charge trapping
dielectric layer and patterned to form wordlines that overlie the bitlines. The
pocket implants serve to mitigate, among other things, complementary bit disturb
(CBD) that can result from semiconductor scaling. As such, semiconductor devices
can be made smaller and increased packing densities can be achieved by virtue of
the inventive concepts set forth herein.