A drain-extended metal-oxide-semiconductor transistor (40) with improved
robustness in breakdown characteristics is disclosed. Field oxide isolation structures
(29c) are disposed between the source region (30) and drain
contact regions (32a, 32b, 32c) to break
the channel region of the transistor into parallel sections. The gate electrode
(35) extends over the multiple channel regions, and the underlying well
(26) and thus the drift region (DFT) of the transistor extends along the
full channel width. Channel stop doped regions (33) underlie the field oxide
isolation structures (29c), and provide conductive paths for carriers
during breakdown. Parasitic bipolar conduction, and damage due to that conduction,
is therefore avoided.