A photosensitive resin composition is disclosed that includes (A) a heat-resistant
polymer of the general formula (1):
##STR1##
(where the symbols are as defined in the specification), (B) a photoreactive
compound, and (C) a solvent. A relief pattern is formed from the composition by
applying the composition to a support substrate and drying it to form a photosensitive
resin film; exposing the dried film; developing the exposed film using an alkaline
aqueous solution; and heating the developed photosensitive resin film. Also disclosed
is an electronic component that includes an electronic device having such a pattern.