A pre-ionizing arrangement for a gas laser includes two ceramic-jacketed ionizer
electrodes extending into an enclosure including spaced-apart slab electrodes of
the laser and a lasing gas at reduced pressure. RF power is applied to the dielectric-jacketed
ionizer electrodes creating a gas discharge between the dielectric-jacketed ionizer
electrodes. This discharge provides ions in the laser gas. The presence of these
ions in the lasing gas facilitates ignition of a gas discharge between the slab
electrodes for energizing the laser.