A polarization modulation photoreflectance technique has been developed for optical
characterization of semiconductor quantum confined structures. By using a tunable
laser source in conjunction with polarization state modulation, a single beam modulation
spectroscopy technique may be used to characterize the optical response of semiconductor
materials and structures. Disclosed methods and instruments are suitable for characterization
of optical signatures of quantum electronic confinement, including resolution of
excitonic states at the band edge or other direct or indirect critical points in
the band structure. This allows for characterization of semiconductor quantum well
structures, for characterization of strain in semiconductor films, and for characterization
of electric fields at semiconductor interfaces.