A detector assembly including a support element, a first capacitor plate and a
second capacitor plate. The support element is configured to attach the detector
assembly to a chamber wall that separates a lower pressure region and a higher
pressure region. A surface of the second capacitor plate is spaced apart from a
surface of the first capacitor plate to define a capacitor gap. The first capacitor
plate is positioned to be inside the lower pressure region when the detector assembly
is attached to the chamber wall. The second capacitor plate is supported by the
support element through insulating couplings. The detector assembly also includes
a means for reducing mechanical load on the insulating couplings between the second
capacitor plate and the support element. The reduced mechanical load includes load
caused by a pressure difference between the lower and higher pressure regions.