Methods for fabricating a heterojunction bipolar transistor having a raised
extrinsic base is provided in which the base resistance is reduced by forming a
silicide atop the raised extrinsic base that extends to the emitter region in a
self-aligned manner. The silicide formation is incorporated into a BiCMOS process
flow after the raised extrinsic base has been formed. The present invention also
provides a heterojunction bipolar transistor having a raised extrinsic base and
a silicide located atop the raised extrinsic base. The silicide atop the raised
extrinsic base extends to the emitter in a self-aligned manner. The emitter is
separated from the silicide by a spacer.