Co-fired multilayer piezoelectric ceramic materials with base metal electrodes
based on copper, copper alloy, are found as an effective approach to manufacture
low cost multilayer piezoelectrics. The method of the invention is performed at
low firing temperature and without the oxidation of base metal or reduction of
ceramic components. A variety of ceramic materials may be used and copper is the
preferred base metal in the multi-layer piezoelectric devices of the invention.
This copper has additional protection against oxidation with a small inorganic
coating on the surface. With such protection, the binder and other organics can
also be efficiently removed and produce superior performance in the piezoelectric
structured devices.