A microvalve (10) for controlling fluid flow, including a body portion
(14)
having a plurality of spaced openings (18) formed therein, a shutter (12)
located adjacent to and substantially parallel with the body portion having a plurality
of spaced openings (16) formed therein, a drive mechanism (20, 22)
for causing the shutter to move laterally with respect to the body portion so that
the spaced openings of the shutter are brought into and out of alignment with the
spaced openings of the body portion, wherein the microvalve is in an open position
and a closed position, respectively, and, a latching mechanism (36, 38, 40,
42) for preventing the shutter from moving laterally with respect to the body portion.