This invention provides a semiconductor device having high operation performance
and high reliability. An LDD region 707 overlapping with a gate wiring is
arranged in an n-channel TFT 802 forming a driving circuit, and a TFT structure
highly resistant to hot carrier injection is achieved. LDD regions 717, 718,
719 and 720 not overlapping with a gate wiring are arranged in an n-channel
TFT 804 forming a pixel unit. As a result, a TFT structure having a small
OFF current value is achieved. In this instance, an element belonging to the Group
15 of the Periodic Table exists in a higher concentration in the LDD region 707
than in the LDD regions 717, 718, 719 and 720.