A microelectromechanical (MEM) device for redirecting incident light is disclosed.
The MEM device utilizes a pair of electrostatic actuators formed one above the
other from different stacked and interconnected layers of polysilicon to move or
tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected
component of the incident light which can be shifted in phase or propagation angle.
The MEM device, which utilizes leveraged bending to provide a relatively-large
vertical displacement up to several microns for the light-reflective plate, has
applications for forming an electrically-programmable diffraction grating (i.e.
a polychromator) or a micromirror array.