An absolute encoder employs multiple sub-encoders of different resolutions
and a linking algorithm for combining the sub-encoder outputs to form an
accurate, high-resolution position estimate. The sub-encoders can utilize
edge modulation of a main grating track, sloped patterns of successively
higher periods, and other types of scale patterns. The sub-encoders can
also use a variety of detector types suitable for the patterns being
used. In one linking approach, pairs of tracks are linked together
successively by applying a phase shift to the coarser track and then
combining it with the finer track such that the transitions of the coarse
track estimates become aligned with those of the finer track, whereupon
the values can be combined to form a linked position estimate. In another
approach, beat tracks are calculated from physical tracks of similar
period, and the beat tracks are used as the coarser tracks in the linking
process. A wafer-handling robot employs the absolute encoder for
controlling rotation of multiple joints.