Photo reticles (110) are formed comprising a first and second printable
features (130), (140) which are connected by a channel assist feature
(150). The size of the channel assist feature is such that the channel assist
feature will not substantially print on photoresist that is exposed using the reticle.
Third printable features (120) can be placed a distance WD from
the channel assist feature (150). The channel assist feature will assist
in the formation of the third printable feature (120).