A flexible recipe modeling system and method is provided for improving the processing
reliability of a fabrication process by customizing recipes processed by fabrication
equipment including associated different chambers of a multi-chamber processing
machine by allowing a responsible engineer to add or modify individual recipe clusters
including grouping of recipes into clusters to represent the same process capacity
for a piece of fabrication equipment and providing a material execute system having
a recipe cluster management engine (RCME) for management of the RCMS.