In this developing method and apparatus, a concentration measuring unit 222
picks part of developing fluid in a blending tank 186 to measure the resist
concentration by an absorption photometry and feeds the detected resist concentration
to a control unit 240. The control unit 240 controls respective valves
210, 212, 216 of a TMAH concentrate solution 200, a solvent pipe
204 and a drain pipe 208 in a manner that the developing fluid in
the blending tank 186 has a TMAH concentration corresponding to a measured
resist-concentration value to accomplish a constant developing rate, performing
component control of the developing fluid. The developing fluid transferred from
the blending tank 186 to a supply tank 188 is fed to a developer
nozzle DN in a developing section 126 through a developer pipe 224
owing to the drive of a pump 228. Accordingly, even if the developing fluid
is reused in the developing process in multiple times, it is possible to make sure
of the uniformity in development.